| 000 | 00357nam a2200145Ia 4500 | ||
|---|---|---|---|
| 008 | 210901s2004 xx 000 0 eng d | ||
| 020 | _a981253072X | ||
| 082 | _a537.622 MAY | ||
| 100 | _aMay, Gary S. | ||
| 245 | 0 | _aFundamentals of semiconductor fabrication | |
| 260 |
_aSingapore _bWiley _c2004 |
||
| 300 | _a306 | ||
| 650 | _aPhysics | ||
| 942 |
_2ddc _cBK |
||
| 999 |
_c26441 _d26441 |
||